プローブユニットおよび原子間力顕微鏡

Probe unit and atomic force microscope

Abstract

【課題】測定に用いるカンチレバーと被測定物間の相対変位を逐次補正して、装置や被測定物の熱膨張や収縮、床振動による装置振動等の影響を受けない原子間力顕微鏡を提供する。 【解決手段】原子間力を検出して被測定物の面形状を計測する計測用カンチレバー7と、被測定物の振動等を検出するための補正用カンチレバー8、9は、それぞれ圧電素子4〜6を介して同一基準であるベース1に支持される。各カンチレバー先端に発生する原子間力を一定に保つため、各カンチレバー7〜9はおのおの独立に圧電素子4〜6によって垂直方向に駆動される。計測用カンチレバー7を駆動する圧電素子4は走査用移動機構を備えており、走査方向に静止した補正用カンチレバー8、9の変位から、計測用カンチレバー7と被測定物間の相対位置の変化を検出し、計測用カンチレバー7による計測値を補正する。 【選択図】図1
PROBLEM TO BE SOLVED: To provide an atomic force microscope capable of correcting sequentially a relative displacement between a cantilever used in measurement and a measuring object not affected by thermal expansion or contraction of an instrument or the measuring object, and by instrument vibration or the like caused by floor vibration. SOLUTION: The measuring cantilever 7 for detecting atomic force to measure a face shape of the measured object, and correcting cantilevers 8, 9 for detecting the vibration or the like of the measured object, are supported by a base 1 with the same reference, via respective piezoelectric elements 4-6. The respective cantilevers 7-9 are respectively driven along a vertical direction independently by the piezoelectric elements 4-6, in order to keep constant the atomic force generated in each cantilever tip. The piezoelectric element 4 for driving the measuring cantilever 7 is provided with a scanning moving mechanism, and detects a relative positional change between the the measuring cantilever 7 and the measured object, based on displacements of the correcting cantilevers 8, 9 stationary along a scanning direction, to correct a measured value by the measuring cantilever 7. COPYRIGHT: (C)2007,JPO&INPIT

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